According to the book “The Secret Collection of Shaolin Qigong” (少林氣功秘集) written and edited by Shi De-Qian and Xu Qin-Yan (釋德虔 徐勤燕 編著)。
http://www.pcono.com/136488.html
少林氣功,源遠流長,約起源于北魏太和年間,距今有一千五百多年的歷史。公元496年,少林寺的開創者跋陀 的門徒稠禪師就能夠踏牆橫行四次,還能持丈解虎等等,可見稠禪師身藏很高的氣功卓技,可列為少林寺最早的一 位氣功武術大師。
“Shaolin Qigong has a long history, it began round about the Tai He Years in the Northern Wei Period (477-499 AD), with more than 1,500 years of history. In the year 496Ad, a disciple of Bei Tuo (跋陀), the founder of Shaolin Temple, by the name of Chou Chanshi (Chan Master Chou) 稠禪師, can be seen walking up a wall diagonally 4 times in a row, and he can also subdue a tiger with a staff and things like that, so one can see he has a high level of Qigong skill, and we can regard him as one of the earlier Qigong and Wushu master of Shaolin Temple.”.
Shi De-Qian, was a former Fang Zhang (the First Abbot, or Head Master) of the Songsan Mountain Shaolin Temple and a noted historian of Shaolin martial arts, so what he said about Shaolin Qigong is credible, IMHO. He only died recently on August 23rd. this year (2011).
Shi also mentioned in his book Damo arrived at Songshan in the year 527 AD, so it seems Buddhist Qigong from Shaolin Temple has its origin before the arrival of Damo.